Aja sputtering manual

manual and the manuals (and hazard warnings) of the individual components. manuals for equipment not supplied by aja should be obtained by the end user. misuse of atc atc orion systems: this product is not designed to be used with corrosive, pyrophoric, toxic or hazardous gases or deposition materials. any operation with such gases or. AJA ORION SPUTTER SYSTEM. Figure 1: AJA Orion Sputter System. Introduction. AJA Orion Sputter System deposits metal as well as dielectric films over a substrate up to 6” in diameter. It is fitted with three 3” diameter sputter guns that are poweredby RF, DC, and pulse sources and can be used for single or multi-layer deposition. The process for pre-sputtering is the same as for deposition. New targets should be pre-sputtered for about 24 hours. For old targets, a minute pre-sputter will work. Shield the substrate by turning it 90 degrees from the gun if it is in the chamber during pre-sputtering. Vacuum Diagram Electrical Diagrams – Located with sputter system.

AJA Sputtering System AJA Sputtering System. Located in VKNRC N,the ATCF sputtering system purchased from AJA International is a high performance and versatile system. The system contains 4 magnetron sputtering guns (2 DC and 2 RF) which allow in-situ tilting of their heads without breaking vacuum. manual and the manuals (and hazard warnings) of the individual components. manuals for equipment not supplied by aja should be obtained by the end user. misuse of atc atc orion systems: this product is not designed to be used with corrosive, pyrophoric, toxic or hazardous gases or deposition materials. any operation with such gases or. AJA ORION SPUTTER SYSTEM. Figure 1: AJA Orion Sputter System. Introduction. AJA Orion Sputter System deposits metal as well as dielectric films over a substrate up to 6" in diameter. It is fitted with three 3" diameter sputter guns that are poweredby RF, DC, and pulse sources and can be used for single or multi-layer deposition.

General training is "hands on"and will cover DC and RF sputtering. Training takes 3 hours, which includes machine operation with a short film deposition. To avoid having to retrain on the machine, the AJA sputtering tool must be used within a week of getting trained. Advanced training consists of reactive Sputtering with O2, or N2. AJA is a manufacturer of thin film deposition systems including magnetron sputtering, e-beam evaporation, thermal evaporation, and ion milling systems. Founded in Scituate, MA, USA in by William Hale, MBA, BS Physics, the company was established as a supplier of innovative ph. ysical vapor deposition (PVD) products. Sections of this document present a sequential, “MANUAL” procedure to deposit thin films with your AJA International, Inc. ATC Series Sputtering System. If you have purchased computer control, it is nonetheless recommended that a few initial runs are made operating the system in the computer’s “manual mode” to.